"Vicki, the customer wants us to have SECS on
the machine, can we do it now?"
Standards - Definitions
Pronounced 'sex gem' -
There some engineer laughing in his grave at
In any case it stands for SEMI Equipment Communications
Standard - General Equipment Model. In short SECS/GEM is the standard
for a protocol by which the various equipment in the semiconducor fab
talk to a central host. The host can be as simple as simply montioring
the status of each tool, or it can be as complex as a dispacher, organizer
and process monitor.
SEMI is a umbrella organization which provides standards
and guidelines for the Semiconductor industry. It's made up of manufactures,
equipment suppliers and material suppliers, thus the name Semiconductor
Equipment and Materials International.
There's an alphabet soup
of SEMI standards describing it and other factory
protocols used in an excruciatingly painful amount of detail. A few
of the ones I'm responsible for knowing.
SEMI E5 - SEMI Equipment Communications Standard
2 Message protocol (SECS-II)
SEMI E30 - Generic model for communications and control of SEMI Equipment
SEMI E37 - High-Speed SECS Message Services (HSMS) - Ethernet protocol
SEMI E39 - Object Services Standard
SEMI E40 - Standard for Processing Management (PJC)
SEMI E84 - Enhanced Carrier Handoff Parallel I/O interface
SEMI E87 - Specification for Carrier Management (CMS)
SEMI E90 - Specification for Substrate Tracking
SEMI E94 - Specification for Control Job Management (CJM)
The last group are designed for 300mm tool automation, and collectively
known as i300.